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Silicon Carbide Solidae

Vetek semiconductor solidum Silicon carbide est momenti tellus component in Plasma Etching Equipment, solidum Silicon Carbide (CVD Silicon Carbide) Partibus in Etching apparatu includitfocusing annulos, Gas showhead, Tray, Edge Annulorum, etc Ob ad humilis Reactivity et conductivity solidum Silicon Carbide (CVD Silicon Carbide) ad CHLORUM - et Plasma Plasma Etching Equipment Focusing Annulorum et aliarum components.


Exempli gratia, in focus anulus est momenti pars positus extra laganum et in directum contactus cum laganum, per applicando ad anulum ad focus in plasma transiens per anulum, ita focusing ad plasma in laganum ad amplio in dispensando. Traditional Focus anulus factum est de Silicon autquartz, PROLIXUS Silicon ut communis focus anulum materia, quod est fere prope ad conductivity Silicon Wafers, sed penuria est pauper etching resistentia in fluorine, continens Plasma, etching apparatus partibus, ut saepe usus est ad tempus, ibi erit gravis productionis.


Solid sic focus circulumOpus

Working Principle of Solid SiC Focus Ring


Et secundum collatio Focusing circulum et CVD sic focusing circulum:

Compare de Si fundatur focusing circulum et cvd sic focusing circulum
Item Et Cvd sic
Density (g / cm3) 2.33 3.21
Cohors Gap (Ev) 1.12 2.3
Thermal conductivity (W / cm ℃) 1.5 5
CTE (X10-6/ ℃) 2.6 4
Elastica modulus (GPA) 150 440
Durness (GPA) 11.4 24.5
Resistentia ad induendum et corrosio Pauper Praeclarus


Vetek semiconductor offert provectus solidum Silicon Carbide (CVD Silicon Carbide) partibus quasi sic focusing annulos ad semiconductor apparatu. Nostra solida Silicon carbide focusing annulos outperform traditional Silicon in terms of mechanica vires, eget resistentia, scelerisque conductivity, summus temperatus diuturnitatem, et Ion etching resistentia.


Key features nostri sic focusing annulos includit:

Maximum density ad reducitur etching rates.

Optimum Valerius cum summus bandgap.

High scelerisque conductivity et humilis coefficiens de scelerisque expansion.

Mechanica impulsum resistentia et elasticitas.

High duritia, gerunt resistentia, et corrosio resistentia.

Usura fabricaPlasma-amplificata eget vapor depositione (Pecvd)Techniques, nostri sic focusing annulos occursum augendae postulat etching processus in semiconductor vestibulum. Sunt disposito resistere altius plasma virtutis industria, specie inCapacitaliter coniungar Plasma (CCP)systems.

Vetek Semiconductor est Sic Porcek Annulorum providere eximia perficientur et reliability in semiconductor fabrica fabrica. Elige nostrum sic partes pro superior species et efficientiam.


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Gas Shower caput SiC solidum

Gas Shower caput SiC solidum

Solidum SiC Gas Shower Caput magnum munus agit in processu CVD uniformem reddendo, ita ut uniformis calefactio subiecti. VeTek Semiconductor in agro solidorum SiC machinarum per multos annos alte implicatus est et clientes dare potest cum nativus solidi SiC Gas Shower Capitula. Quaecumque autem necessaria sint, inquisitionem tuam expectamus.
Chemical vapor depositionem processus solidum sic ora circulum

Chemical vapor depositionem processus solidum sic ora circulum

Vetek Semiconductor semper committitur ad investigationis et progressionem et vestibulum provectus semiconductor materiae. Hodie, Vetisk Semiconductor fecit magnum profectum in eget vapor depositione processus solidum sic ora anulum uber products et potest providere teloneariorum cum altus customized solidum sic acies annulos. Solidum sic ora annulos providere melius etching uniformitatem et precise wafer positioning cum usus est in electrostatic Chuck, ensuring consistent et reliable etching results. Vultus deinceps ad vestri inquisitionis et decet inter se diu-term sociis.
Firmus Sic Etching Focusing Ring

Firmus Sic Etching Focusing Ring

Solidum siccing focusing circulum est unus de core components of laganum etching processus, quae ludit a partes in fixing lagam, focusing plasma et improving lagam etching uniformitatem. Sicut ducit sic focusing circulum manufacturer in Sina, Vetek semiconductor habet provectus technology et perfectum processus, et artifices solidum siccantem focusing anulum quod plene occurrit necessitatibus finem customers secundum elit. Expectamus ad inquisitionis et decet inter se longa-term sociis.

Veteksemicon solid silicon carbide is the ideal procurement material for high-temperature, high-strength, and corrosion-resistant components used in semiconductor and industrial applications. As a fully dense, monolithic ceramic, solid silicon carbide (SiC) offers unmatched mechanical rigidity, extreme thermal conductivity, and exceptional chemical durability in harsh processing environments. Veteksemicon’s solid SiC is specifically developed for critical structural applications such as SiC wafer carriers, cantilever paddles, susceptors, and showerheads in semiconductor equipment.


Manufactured through pressureless sintering or reaction bonding, our solid silicon carbide parts exhibit excellent wear resistance and thermal shock performance, even at temperatures above 1600°C. These properties make solid SiC the preferred material for CVD/PECVD systems, diffusion furnaces, and oxidation furnaces, where long-term thermal stability and purity are essential.


Veteksemicon also offers custom-machined SiC parts, enabling tight dimensional tolerances, high surface quality, and application-specific geometries. Additionally, solid SiC is non-reactive in both oxidizing and reducing atmospheres, enhancing its suitability for plasma, vacuum, and corrosive gas environments.


To explore our full range of solid silicon carbide components and discuss your project specifications, please visit the Veteksemicon product detail page or contact us for technical support and quotations.


Sicut professionalis {LXXVII} Manufacturer et elit in Sina, habemus nostram officinam. Utrum vos postulo customized servicia in occursum specifica necessitatibus vestris regione vel volunt emere provectus et durabile {LXXVII} in Sina, vos potest relinquere nos nuntium.
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