Tac coating gyrationis susceptator

Vetisk Semiconductor Tac coating rotationis susceptator est a key component ad laganum tractantem in semiconductor processus. EiusTac quidNostraHabet optimum summus temperatus tolerantia (liquescens punctum usque ad MMMDCCCLXXX ° C) chemical stabilitatem et corrosio resistentia, quae ensure altus praecisione et alta qualitas in lectus processus.

Tac coating gyrationis susceptator (Tantalum ipsum coating gyrationis susceptator) est clavis apparatu component in semiconductor processus. Solet installed inChemical vapor depositione (CVD)Et Molecular trabem epitaxy (MBE) apparatu ad suscipio et rotate wafers ut uniformis materia depositione et agentibus. Hoc genus productum significantly amplio ministerium vitae et perficientur in apparatu in altum temperatus et corrosive environments per coating subiectum cumTantalum Carbon (Tac) coNostra.

Tac coating gyrationis susceptator solet composito ex Tac coating et Graphite vel Silicon carbide ut subiectum materia. Tac est ultra-summus temperatus tellus materia cum maxime princeps liquescens punctum (liquescens punctum usque ad MMMDCCCLXXX ° C), duritiam (Vickers duritia est de MM HK) et excellens chemical corrosio resistentia. Vetek semiconductor potest efficaciter et aequaliter operient Tantalum carbon coating in subiecto materia per CVD technology.

Rotationis susceptator est plerumque de excelsis scelerisque conductivity et princeps viribus materiae (Graphite velSilicon Carbide), Quod potest providere bonum mechanica firmamentum et scelerisque stabilitatem in altum temperatus environments. Perfectum compositum de duabus determinat perfectum perficientur Tac coating rotationis susceptos suscipiendo et rotating wafers.

Tac coating gyrationis susceptator sustinet et conuertitur laganum in CVD processus. Vicae Vickers Tac Tac est de MM HK, quae dat eam resistendum crebris friction de materia et ludere bonum supporting partes, ita per ensuring quod reactionem Gas est aequaliter distribui in laganum superficiem et materiam aequaliter deposita. Simul altum temperatus tolerantia et corrosio resistentiam Tac coating enable utendum diu in altum temperatus et mordere atmosphaeras, quae effective vitat contaminationem lagae et carrier.

Praeterea, scelerisque conductivity of TAC XXI w / m K, qui habet bonum calor translatio. Igitur Tac coating rotationis susceptator non calefacere laganum aequaliter sub altum temperatus conditionibus et ensure uniformitatem Gas depositionem processus per gyratorium motus, ita maintaining consistency et altumWafer incrementum.

Tantalum carbide (Tac) coating in microscopic crucem-sectioni：

Physica proprietatibus Tac coNostra：

Tac coating gyrationis susceptator shops: