· Primabis Aapplicatio:Optimized pro processibus semiconductoris lagani furnum.
· Operating Temperature;Stabilis operatio ab CC°C ad DCC°C.
· Exc*ibi ellentmal Uniformitas:Distributionem efficit ut calor laganum conveniat processus.
· Humilis particulaGeneratio;Densa CVD SiC efficiens contagium minuit et productio cedit melioris.
· Resistentia chemica superior:Repugnant oxidationis et processus corrosivi vapores in processu scelerisque.
· Outstanding Thermal Concursores Repugnantia:Integritas structuram conservat per cyclos citatos calefactiones et refrigerationes repetitas.
· Vita servitii longi:Vigere repugnans SiC efficiens signanter extendit componentem vita et sustentationem costs minuit.
· ConsuetudinemVestibulum:Praesto sunt in variis magnitudinibus et conformationibus ut diversis instrumentis RTP/RTA par.
Technical Specifications
Basic Physical Properties of CVD SiC Coating
Property
Typical Value
Crystal Structure
FCC β Phase polycrystallina, maxime (111) convertatur
Densitas
3.21 g/cm³
duritia
MMD Vickers durities (500 g onus)
Frumenti Size
2-10 μm
Puritas chemica
99.99995%
Calor Capacitas
640 J·kg⁻¹·K⁻¹
Sublimatio Temperature
MMDCC°C
Flexurae Fortitudo
415 MPa (RT, 4-punctum flexionis);
Modulus
430 GPa (4-punctum vergentis, 1300°C)
Scelerisque Conductivity
300 W·m⁻¹·K⁻¹
Scelerisque Expansion Coefficient (CTE)
4.5 10⁻⁶ K⁻¹
Applications
·Celeri Thermal Annealing (RTA)
· Celeri Scelerisque Processing (RTP)
· Silicon Wafer Annealing
· Dopant Activation
· Oxidation
· Diffusio
·Compone Semiconductor Vestibulum
·MEMS Fabricatio
·Power Semiconductor Processing
FAQ
1. What is an RTP/RTA Carrier?
An RTP/RTA Portitorem laganum subsidium componentibus adhibitum est in celeri processui scelerisque et systematis furnariis celeri. Secure tenet lagana semiconductoris dum uniformis caloris transferre per cyclum scelestum.
2. Cur CVD SiC vestis praeponitur?
Comparatus cum graphite nudo, CVD SiC coating oxidationis superiorem praebet resistentiam, inferiorem generationem particulam, stabilitatem chemicam, et signanter vitam servitutis longiorem.
For inquiries about Silicon Carbide Coating, Tantalum Carbide Coating, Special Graphite or price list, please leave your email to us and we will be in touch within 24 hours.
Crusulis utimur ut meliorem experientiam pasco tibi praebeamus, situm negotiationis et personalize contentus analyse. Hoc situ utendo, ad nostrum crustulorum usum consentis. Privacy Policy